photolithography

n. production of lithographs through photoengraving

Photolithography (also optical lithography) is a process used in microfabrication to selectively remove parts of a thin film (or the bulk of a substrate). It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical (photoresist, or simply "resist") on the substrate. A series of chemical treatments then engraves the exposure pattern into the material underneath the photoresist. In a complex integrated circuit (for example, modern CMOS), a wafer will go through the photolithographic cycle up to 50 times.
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Noun
1. a planographic printing process using plates made from a photographic image
(hypernym) lithography

(n.)
The art or process of producing photolithographs.
  

lithography where the pattern is defined by a photographic process.