ilāh

is the Arabic for "deity". It is cognate to Northwest Semitic ’ēl and Akkadian ilu. The word is from a Proto-Semitic archaic biliteral meaning "god" (possibly with a wider meaning of "strong"), which was extended to a regular triliteral by the addition of a h (as in Hebrew Eloah). The word is spelled either with an optional diacritic alif to mark the ā (as is the case with Allah), or (more rarely) with a full alif, .
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