furnace
n.
apparatus which generates heat (for heating homes, melting metals, etc.)
Furnace
furnace
Noun
1. an enclosed chamber in which heat is produced to heat buildings, destroy refuse, smelt or refine ores, etc.
(hypernym) chamber
(hyponym) athanor
(part-meronym) grate, grating
Furnace
(n.)
To throw out, or exhale, as from a furnace; also, to put into a furnace.
(n.)
An inclosed place in which heat is produced by the combustion of fuel, as for reducing ores or melting metals, for warming a house, for baking pottery, etc.; as, an iron furnace; a hot-air furnace; a glass furnace; a boiler furnace, etc.
(n.)
A place or time of punishment, affiction, or great trial; severe experience or discipline.
Webster's Revised Unabridged Dictionary (1913), edited by Noah Porter.
About
Furnace
a type of semiconductor manufacturing equipment used to heat up groups of wafers to temperatures >200oC and <1,300oC, with precise temperature control. Furnaces have quartz tubes sufficiently large to hold a wafer boat and the tube is surrounded by resistance heating elements. The quartz tube has one end connected to a gas controller that allows various gases to flow through the tube, the furnace would also commonly have the ability to change temperatures in a controlled manner and insert and withdraw the wafer boat all under computer control. Computer programs may then insert the wafer boat into a controlled atmosphere, increase the temperature, make changes in the gases flowing and then reduce the temperature and withdraw the wafer boat to accomplish oxidation, diffusion, alloying or annealing. Standard furnace typically ramp-up at 5-10oC/min. and ramp-down at 2-3oC/min.