a compond of titanium metal and nitrogen gas (TiN), titanium nitride is very inert and serves as an excellent barrier metel. Titanium nitride has a
resistivity of 21.7µohm-cm, a density of 5.43 g/cm3, a melting point of 2,930oC, adheres well to diletrics, has poor wire bondability and is easy to pattern and etch.