Silicon Tetrachloride
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Silicon tetrachloride
Silicon tetrachloride is the
chemical compound
with the
formula
SiCl4. It was prepared by
Jöns Jakob Berzelius
in
1823
.
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®
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Integrated Circuit Dictionary
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Silicon Tetrachloride
chemical formula SiCl4silicon tetrachloride is a corrosive, with a pungent, suffocating odor. Silicon tetrachloride is used for CVD deposition of silicon nitride and epitaxial silicon films.
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