Silane
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Silane
Silane is a
chemical compound
with
chemical formula
Si
H
4. It is the
silicon
analogue of
methane
. At
room temperature
, silane is a gas, and is
pyrophoric
— it undergoes spontaneous
combustion
in
air
, without the need for external ignition. However, one school of thought holds that silane itself is stable and that the natural formation of larger silanes during production causes its pyrophoricity. Above 420°C, silane decomposes into silicon and
hydrogen
; it can therefore be used in the
chemical vapor deposition
of silicon.
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Silane
chemical formula SiH4, silane is a pyrophoric, toxic gas with a TLV of 5ppm, and is combustible in the range of ~1-96%. Silane is widely used to deposit silicon containing films in a variety of CVD reactions.
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silane
aliens saline
Glosarium Pusat Bahasa Depdiknas Indonesia
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silane
B: (Kimia) silana
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