A photomask is an opaque plate with holes or transparencies that allow light to shine through in a defined pattern. They are commonly used in
photolithography. Lithographic photomasks are typically transparent
fused silica blanks covered with a pattern defined with a chrome metal absorbing film. Photomasks are used at wavelengths of 365
nm, 248 nm, and 193 nm. Photomasks have also been developed for other forms of radiation such as 157 nm, 13.5 nm (
EUV),
X-ray and
electrons and
ions, but these require entirely new materials for the substrate and the pattern film.
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