Phosphorus Oxychloride

Phosphoryl chloride (commonly called phosphorus oxychloride) is a colourless liquid with the formula POCl3. It hydrolyses in moist air to phosphoric acid to release choking fumes of hydrogen chloride. It is manufactured industrially on a large scale from phosphorus trichloride and oxygen or phosphorus pentoxide. It is mainly used to make phosphate esters such as tricresyl phosphate.
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chemical formula POCl3, phosphorus oxychloride is a liquid at room temperature and was at one time widely used as a source of phosphorus during pre-deposition processes. During the pre-deposition process, Nitrogen gas is bubbled through heated phosphorus oxychloride liquid. The nitrogen gas leaves the bubbler carrying vapor of phosphorus oxychloride into the pre-deposition furnace. Phosphorus oxychloride's vapor pressure ranges from approximately 8m of Hg at 0oC, 3mm of Hg at 25oC to 12mm of Hg at 50oC.