Nitrogen trifluoride, NF3, a binary compound of
nitrogen and
fluorine, is a colorless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure. It has a characteristic moldy odor. It is a pulmonary irritant with toxicity comparable with
nitrogen oxides. It may damage liver and kidneys. It is slightly soluble in water without undergoing chemical reaction.
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chemical formula NF3, nitrogen trifluoride is an oxidizer and toxic gas with a TLV of 10ppm. Nitrogen trifluoride has a mold like odor. Nitrogen trifluoride is used as an etch gas and as a cleaning agent in CVD systems.
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