In
semiconductor manufacturing, a Low-κ
dielectric is a material with a small
dielectric constant relative to silicon dioxide. Although the proper symbol for the dielectric constant is the
Greek letter κ (kappa), in conversation such materials are referred to as being "low-k" (low-kay) rather than "low-κ" (low-kappa). Low-κ dielectric material implementation is one of several strategies used to allow continued scaling of microelectronic devices, colloquially referred to as extending
Moore's law. In digital
circuits, insulating dielectrics separate the conducting parts (wire
interconnects and
transistors) from one another. As components have scaled and transistors have gotten closer and closer together, the insulating dielectrics have thinned to the point where charge build up and
crosstalk adversely affect the performance of the device. Replacing the silicon dioxide with a low-κ dielectric of the same thickness reduces parasitic capacitance, enabling faster switching speeds and lower heat dissipation.
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a dielectric material with a dielectric constant less than the dielectric constant of silicon dioxide, k<4. The propagation delay of a signal through an interconnect layer is related to the resistance and capacitance of the conductor. Low-k dielectric materials surrounding the conductor reduce capacitance and propagation delay.