Excimer laser
Excimer laser
Excimer Laser
The term excimer comes from the combination of excited and dimer. The excimer laser was developed in the late seventies and has output in the ultraviolet and near ultraviolet region. In an excimer laser a noble gas such as krypton, Kr, or xenon, Xe, is excited in the presence of a halogen such as fluorine, F, or chlorine, Cl, and neon, Ne, or helium, He, in a resonant cavity. A high voltage pulse dissociates electrons from the noble gas molecules creating a plasma. In the excited state, noble gas atoms combine with the halogen atoms forming a metastable compound such as KrF or ArF with a lifetime of several nanoseconds. When the electrons in the outer shell of the excited compound are stimulated to a lower energy level, ultraviolet light is emitted and the metastable compound disassociates in a few femtoseconds into the original elements.