Coater

a piece of semiconductor process equipment utilized to perform the coating process. Coaters typically provide an input and output elevator that can hold wafer cassettes, have a shuttle system to transport wafers from the input to the spin head, and transport wafers from the spin head to the output. Coaters may also include hotplates to bake wafers before or after coating and chill plates to return the wafer temperature to room temperature following baking.

CHI METTE GIACCA. CHI RIVESTE