Boron tribromide
Boron Tribromide
chemical formula BBr3, boron tribromide is a liquid at room temperature and was at one time widely used as a source of boron during pre deposition processes. During the pre deposition process, Nitrogen gas is bubbled through heated boron tribromide liquid. The nitrogen gas leaves the bubbler carrying vapor of boron tribromide into the per deposition furnace. Boron tribromide's vapor pressure ranges from approximately 15mm of Hg at 0oC, 63mm of Hg at 25oC to 170mm of Hg at 50oC. Boron Trichloride - chemical formula BCl3, boron trichloride is a corrosive toxic gas with a TLV of 5ppm. Boron trichloride has a pungent irritating odor and is a corrosive. Boron trichloride is most commonly used as an etch gas for aluminum, but may also be used as a Boron Source for Doping.