Atom probe
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Atom probe
The atom probe is an atomic-resolution
microscope
used in
materials science
that was invented in 1967 by
Erwin Müller
,
J. A. Panitz
, and S. Brooks McLaneThe atom probe made one-dimensional compositional maps by combining
time-of-flight
spectroscopy
and
field ion microscopy
(FIM). The instrument allows the three-dimensional reconstruction of up-to hundreds-of-millions of
atoms
from a sharp tip (corresponding to specimen volumes of 10,000-1,000,000
nm
3).
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